Measure volume resistivity up to 10^18 Ω-cm or surface resistivity up to 10 Ω. The test fixture is designed using a three-lug triaxial connector that allows simple connection to a Keithley Electrometer. This measurements will show how much is an insulating material’s resistance to leakage current through its body and surface.

Two main applications. First, a four-point sheet resistance measurement of a thin layer or substrate which is used in nanofabrication to measure the resistive properties of conducting films. Second, a three-point spreading resistance measurements to analyze resistivity versus depth in semiconductors. The tool is used primarily for determining doping structures in silicon semiconductors